OWP-BL43-426C Electric Coolant Pump for Lithography Machine Liquid-cooled System Use

The OWP-BL43-426C Electric Coolant Pump is a high-performance solution designed for precision cooling systems, with a primary focus on supporting the stable operation of lithography machines. Its robust design, advanced protection features, and flexible performance make it ideal for demanding industrial cooling scenarios, especially where temperature control and reliability are critical.

A key use case for the OWP-BL43-426C Electric Coolant Pump is lithography machine liquid cooling, a critical application where precise heat dissipation directly impacts chip manufacturing quality. Lithography machines generate significant heat from components like laser light sources, projection objectives, and precision worktables—even tiny temperature fluctuations can cause optical element deformation or laser wavelength drift, leading to reduced chip yield.

The OWP-BL43-426C addresses these challenges by delivering consistent, high-volume coolant flow (up to 5000L/H) and stable lift (max 20M), ensuring efficient heat transfer across sensitive lithography components. Its compatibility with cooling media like glycol-water mixtures and dielectric oil allows it to adapt to different lithography machine cooling requirements, while PWM speed control enables real-time adjustments to match heat output changes. With an IP68 rating, it also withstands harsh industrial environments, preventing coolant leaks or pump damage that could disrupt production.

• Comprehensive Protection Mechanisms: Features reverse polarity protection, dry running protection, over-voltage/current protection, and overload/over-temperature protection—minimizing pump failure risks and extending service life.
• Efficient and Durable Motor: Built with a high-efficiency brushless DC motor, it reduces power consumption while achieving a service life of over 20,000 hours, lowering maintenance costs.
• Precision Performance: Constant flow control ensures stable coolant delivery, critical for maintaining consistent temperatures in lithography machines.
• Wide Environmental Adaptability: Operates reliably in extreme temperatures (-40℃ to +85℃ (-40°F to +185°F)) and high humidity (≤90%), suitable for diverse factory conditions.
• Easy Integration: Flange quick-connect design and compatible AMP connectors simplify installation and replacement, reducing downtime for lithography systems.

PWM & Fault Feedback

Flow VS Head

Dimensions Diagrams